Modelling and Identification of a High-precision Planar Positioning System
نویسندگان
چکیده
This contribution is dedicated to developing a thorough physical model of a high-precision planar positioning system. Subject of this investigation is Tetra’s state-of-the-art high-precision planar positioning system “PPS200” using air bearings and electromagnetic coupling as a principle of propulsion. We develop physical models of all components and investigate the influence of various physical effects. The model characteristics and parameters are identified using experimental data taken from the dedicated test rig. The resulting system is implemented as a simulation model and verified by measurements of several experiments conducted at the test rig.
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